The Stylus System Of UMAP Mitutoyo Stylus (1999)

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The stylus system that is categorised in this group is the stylus system of micro CMM, which has a similar design with the conventional CMM probing system. As described in ISO 10360-1, the stylus system has a spherical stylus tip, a rod stylus shaft and a sensing element. These styluses also operate in contact mode.
(1.1 until 1.5 have been discussed in progress report 2)
1.1 UMAP Mitutoyo Stylus (1993-1999) Figure 2.1: construction of UMAP stylus system Mitutoyo UMAP stylus system was first developed by a group of researchers in 1993 to 1999 at University of Tokyo, Japan [1]. After that, this research has been continued by the Mitutoyo Research Centre Europe and was commercialised by the Mitutoyo Company [2]. There are three models of stylus system which are UMAP 103, UMAP 110 and UMAP 130. UMAP 103 consists of the smallest diameter of sphere stylus tip, which is 30 µm, a stylus shaft of 20 µm in diameter and 3 mm in length. On the other hand, UMAP 110 consists of a stylus sphere tip diameter of 100 µm, with stylus shaft diameter of 80µm and stylus length of 10mm. While UMAP 130 consists of a stylus sphere tip of 300 µm, stylus shaft diameter of 200 µm and stylus length of 10 mm. Figure 1 shows the construction and component of the stylus system. This stylus system was initially developed for the profile measurement of the ink jet and fuel injection nozzles. For this intention, it was designed to have a long and thin stylus which can access a microhole depth. Thus, one of the advantages of this stylus is it can be performed in a high aspect ratio measurement [3]. Most of the literature that described this stylus system focused on the sensor mechanism when in contact with the workpieces. The UMAP stylus uses the PZT forces sensor as the driving and sensing electrode. The stylus is vibrated in its longitudinal resonant state at approximately 349 kHz by the driving electrode. Meanwhile, the sensing electrode will detect any changes in the stylus’ vibrational amplitude, phase or resonant frequency. At the moment, when the stylus is in contact with any workpiece, the stylus vibration decreases as compared to the non-contacted state, thus, the amplitude will definitely decrease. A change in amplitude will be detected by the sensing electrode [4][3]. In terms of the fabrication process of the stylus system, the stylus shaft is made by Nickel-Chromium (Ni-Cr) and the stylus tip sphere is made of glass.
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By using the glass to metal sealing technology, a melted glass is mounted like water drop at the tip of Ni-Cr wire stylus shaft. The surface tension of the glass will form the sphere shape. The assembly process occurs in the vacuum technology. One of the reasons that Ni-Cr stylus shaft was selected in this design is because of the property’s affinity towards the glass is extremely high [4][3]. Other important properties of the UMAP stylus system are the ability to mount to the Mitutoyo Micro CMM. The repeatability of the UMAP 103 is σ= less than 0.1µm and has a measuring speed of less than 100µm/sec. The measuring range of the UMAP 103 is 245 x 200 x 200 mm, with a contact force of 0.15 µN to 10 µN and stiffness of 21kN/m. The UMAP 103 stylus system can also be removed, installed, and replacing the stylus easily by the user. In the scope of the research project, the 30 µm in diameter of stylus sphere tip for the UMAP stylus system is considered as huge, thus, it needs to be sized down to at least 10 µm in diameter. The ability of the metal to glass sealing technology process to be applied in the fabrication process needs to be investigated for developing a smaller stylus than the 30 µm in diameter of stylus sphere tip since the fabrication process was used in assembling the shaft and the stylus tip. According to the literature, the material used in the stylus shaft, which is Nickel-Chromium (Ni-Cr) can be added to the material list for the stylus shaft, even though the material usually used for the stylus shaft is from tungsten or tungsten carbide. This stylus is designed for a high aspect ratio measurement. There is no literature found mentioning the effect of the long

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